Arrangement and method for removing alkali- or alkaline...

Cleaning and liquid contact with solids – Processes – Including forming a solidified or hardened coating for cleaning

Reexamination Certificate

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Details

C134S001000, C134S021000

Reexamination Certificate

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08083859

ABSTRACT:
The invention relates to a cleaning method in which from a vacuum coating chamber (3) of a coating installation (1) for the coating of substrates (2) with alkali- or alkaline earth-metals, residues of alkali- or alkaline earth-metals are removed. For this purpose into the chamber (3) a gas from the group of N2, O2or air is introduced, which reacts with the alkali- or alkaline earth-metals to form the corresponding solid compounds. Water can additionally be introduced into the vacuum coating chamber (3).After the alkali- or alkaline earth-metals have reacted with the gas, the corresponding solid compound is removed from the vacuum coating chamber.

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