Cleaning and liquid contact with solids – Processes – Including forming a solidified or hardened coating for cleaning
Reexamination Certificate
2008-05-30
2011-12-27
Kornakov, Michael (Department: 1714)
Cleaning and liquid contact with solids
Processes
Including forming a solidified or hardened coating for cleaning
C134S001000, C134S021000
Reexamination Certificate
active
08083859
ABSTRACT:
The invention relates to a cleaning method in which from a vacuum coating chamber (3) of a coating installation (1) for the coating of substrates (2) with alkali- or alkaline earth-metals, residues of alkali- or alkaline earth-metals are removed. For this purpose into the chamber (3) a gas from the group of N2, O2or air is introduced, which reacts with the alkali- or alkaline earth-metals to form the corresponding solid compounds. Water can additionally be introduced into the vacuum coating chamber (3).After the alkali- or alkaline earth-metals have reacted with the gas, the corresponding solid compound is removed from the vacuum coating chamber.
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Bangert Stefan
Dieguez-Campo Jose Manuel
Koenig Michael
Krishna Nety M.
Kwak Byung-Sung Leo
Applied Materials Inc.
Blan Nicole
Cooley LLP
Kornakov Michael
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