Area based optical proximity correction in raster scan printing

Details Area based optical proximity correction in raster scan printing Area based optical proximity correction in raster scan printing

2004-07-01

2008-08-05

Garcia, Gabriel I. (Department: 2625)

Incremental printing of symbolic information

Ink jet

Controller

C347S024000, C358S001900, C382S167000

Reexamination Certificate

active

07407252

ABSTRACT:
Methods and apparatus for correcting defects, such as rounded corners and line end shortening, in patterns formed via lithography are provided. Such defects are compensated for “post-rasterization” by manipulating the grayscale values of pixel maps.

REFERENCES:
patent: 5329614 (1994-07-01), Kidd et al.
patent: 5363119 (1994-11-01), Snyder et al.
patent: 5533170 (1996-07-01), Teitzel et al.
patent: 5553170 (1996-09-01), Kumagai
patent: 5631981 (1997-05-01), Rao
patent: 5751852 (1998-05-01), Marimont et al.
patent: 6023530 (2000-02-01), Wilson
patent: 6038348 (2000-03-01), Carley
patent: 6061476 (2000-05-01), Nichani
patent: 6141460 (2000-10-01), Amer et al.
patent: 6356300 (2002-03-01), Shiba
patent: 6556702 (2003-04-01), Rishton et al.
patent: 2002/0199157 (2002-12-01), Cobb
patent: 2003/0107770 (2003-06-01), Klatchko et al.
patent: 2003/0160980 (2003-08-01), Olsson et al.
patent: 2003/0161534 (2003-08-01), Loce et al.
patent: WO 2004/032000 (2004-04-01), None
Ajit Singh et al., “Grey Level Corner Detection: A Generalization and a Robust Real Time Implementation,”Computer Vision, Graphics, and Image Processing, Jul. 1990, vol. 51(1): pp. 54-69.
S.A. Rishton et al., “Raster shaped beam pattern generation,”J. Vac. Sci. Technol., Nov./Dec. 1999, vol. B 17(6): pp. 2927-2931.
PCT International Search Report and Written Opinion for PCT/US2005/023590, dated Dec. 12, 2005.
European Examination Report dated Jun. 22, 2007.

Affiliated with

Also associated with

Rating

Area based optical proximity correction in raster scan printing does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Area based optical proximity correction in raster scan printing, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Area based optical proximity correction in raster scan printing will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3994152