Architecture and process for integrating DMD with control circui

Details Architecture and process for integrating DMD with control circui Architecture and process for integrating DMD with control circui

1991-01-04

1992-03-24

Laroche, Eugene R.

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359295, G02B 2600

Patent

active

050993534

ABSTRACT:
DMD projection light values for HDTV have various manufacturing requirements, including the high yield integration of the DMD superstructure on top of an underlying CMOS address circuit. The CMOS chip surface contains several processing artifacts that can lead to reduced yield for the DMD superstructure. A modified DMD architecture and process are disclosed that minimizes the yield losses caused by these CMOS artifacts while also reducing parasitic coupling of the high voltage reset pulses to the underlying CMOS address circuitry.

REFERENCES:
patent: 3746785 (1973-07-01), Goodrich
patent: 3924228 (1975-12-01), Goodrich
patent: 4248504 (1981-02-01), Albertinetti et al.
patent: 4441791 (1984-04-01), Hornbeck
patent: 4592628 (1986-06-01), Altman et al.
patent: 4660938 (1987-04-01), Kazan
patent: 4909611 (1990-03-01), Spooner

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