Architecture and process for integrating DMD with control circui

Details Architecture and process for integrating DMD with control circui Architecture and process for integrating DMD with control circui

1992-01-02

1993-06-01

Arnold, Bruce Y.

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359295, 437 64, 437228, G02B 2600, H01L 21302, H01L 21465

Patent

active

052165370

ABSTRACT:
DMD projection light values for HDTV have various manufacturing requirements, including the high yield integration of the DMD superstructure on top of an underlying CMOS address circuit. The CMOS chip surface contains several processing artifacts that can lead to reduced yield for the DMD superstructure. A modified DMD architecture and process are disclosed that minimizes the yield losses caused by these CMOS artifacts while also reducing parasitic coupling of the high voltage reset pulses to the underlying CMOS address circuitry.

REFERENCES:
patent: 3886310 (1975-05-01), Guldberg
patent: 4492435 (1985-01-01), Banton et al.
patent: 4615595 (1986-10-01), Hornbeck
patent: 4638309 (1987-01-01), Ott
patent: 5099353 (1992-03-01), Hornbeck

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