Applications operating with beams of charged particles

Details Applications operating with beams of charged particles Applications operating with beams of charged particles

2005-04-12

2005-04-12

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

Reexamination Certificate

active

06878936

ABSTRACT:
A particle-optical apparatus is proposed which comprises a particle-optical lens for deflecting a plurality of separate beam-charged particles which is provided by a plurality of finger electrodes provided along an opening of the lens.

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patent: WO 0122469 (2001-03-01), None

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