Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1992-06-19
1993-11-09
Schilling, Richard L.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430311, 430314, 430318, 428137, 428 40, 29827, 29846, 257664, 257668, G03C 500
Patent
active
052601684
ABSTRACT:
A method for patterning a tape to which an integrated circuit may be bonded including providing a tape having a top layer of unexposed film which, when exposed in an interconnection pattern and developed, acts as a mask for processing a photoprocessable layer of the tape to provide conductive portions in an interconnection pattern on the tape.
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Lake et al., application Ser. No. 07/489,789, "Method of Patterning Resist".
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Neville Thomas R.
Schilling Richard L.
The Foxboro Company
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