Application of intermediate wavelength band spectroscopic...

Optics: measuring and testing – By polarized light examination – Of surface reflection

Reexamination Certificate

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Reexamination Certificate

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10943821

ABSTRACT:
Disclosed is application of oblique angle of incidence, reflection and/or transmission mode spectroscopic ellipsometry PSI and/or DELTA, (including combinations thereof and/or mathematical equivalents), vs. wavelength data over an intermediate wavelength band range around a pass or reject band, to monitor and/or control fabrication of multiple layer high/low refractive index band-pass, band-reject and varied attenuation vs. wavelength thin film interference filters, either alone or in combination with transmissive non-ellipsometric electromagnetic beam turning point vs. layer data obtained at an essentially normal angle of incidence.

REFERENCES:
patent: 6297880 (2001-10-01), Rosencwaig et al.
patent: 6636309 (2003-10-01), Johs et al.
patent: 6781692 (2004-08-01), Rosencwaig
patent: 6940595 (2005-09-01), Johs et al.
patent: 2002/0113966 (2002-08-01), Shchegrov et al.
patent: 2003/0053053 (2003-03-01), Opsal et al.
patent: 2004/0207844 (2004-10-01), Nabatova-Gabain et al.

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