Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2007-11-13
2007-11-13
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
By polarized light examination
Of surface reflection
Reexamination Certificate
active
10943821
ABSTRACT:
Disclosed is application of oblique angle of incidence, reflection and/or transmission mode spectroscopic ellipsometry PSI and/or DELTA, (including combinations thereof and/or mathematical equivalents), vs. wavelength data over an intermediate wavelength band range around a pass or reject band, to monitor and/or control fabrication of multiple layer high/low refractive index band-pass, band-reject and varied attenuation vs. wavelength thin film interference filters, either alone or in combination with transmissive non-ellipsometric electromagnetic beam turning point vs. layer data obtained at an essentially normal angle of incidence.
REFERENCES:
patent: 6297880 (2001-10-01), Rosencwaig et al.
patent: 6636309 (2003-10-01), Johs et al.
patent: 6781692 (2004-08-01), Rosencwaig
patent: 6940595 (2005-09-01), Johs et al.
patent: 2002/0113966 (2002-08-01), Shchegrov et al.
patent: 2003/0053053 (2003-03-01), Opsal et al.
patent: 2004/0207844 (2004-10-01), Nabatova-Gabain et al.
Hale Jeffrey S.
Herzinger Craig M.
Johs Blaine D.
Woollam John A.
Akanbi Isiaka O
Chowdhury Tarifur
J.A. Wollam Co., Inc.
Welch James D.
LandOfFree
Application of intermediate wavelength band spectroscopic... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Application of intermediate wavelength band spectroscopic..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Application of intermediate wavelength band spectroscopic... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3828902