Electric heating – Metal heating – By arc
Reexamination Certificate
2007-01-17
2010-06-08
Paschall, Mark H (Department: 3742)
Electric heating
Metal heating
By arc
C219S121430, C219S121580, C156S345330, C156S345510
Reexamination Certificate
active
07732728
ABSTRACT:
A plasma processing chamber includes a cantilever assembly configured to neutralize atmospheric load. The chamber includes a wall surrounding an interior region and having an opening formed therein. A cantilever assembly includes a substrate support for supporting a substrate within the chamber. The cantilever assembly extends through the opening such that a portion is located outside the chamber. The chamber includes an actuation mechanism operative to move the cantilever assembly relative to the wall.
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International Search Report and Written Opinion dated Jun. 4, 2008 for PCT/US2008/000001.
DeSepte Andy W.
Dhindsa Rajinder
Lenz Eric H.
Li Lumin
Buchanan & Ingersoll & Rooney PC
Lam Research Corporation
Paschall Mark H
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