Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1986-10-24
1989-05-02
Fields, Carolyn E.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250398, 250396ML, H01J 3726
Patent
active
048271276
ABSTRACT:
An apparatus using a charged particle beam is disclosed which includes means for generating charged particles, means for accelerating the charged particles so that the charged particles have desired kinetic energy, lens means including at least one objective lens for focusing a charged particle beam formed of the accelerated, charged particles, on the surface of a specimen, scanning means for scanning the surface of the specimen two-dimensionally with the focused beam, detection means for detecting secondary electrons, reflected electrons, X-rays and light, all of which emerge from the surface of the specimen, objective lens moving means for moving an objective lens nearest to the specimen, and deflection means linked with the objective lens moving means for deflecting the charged particle beam so that the charged particle beam carries out parallel displacement at the objective lens by an amount corresponding to the moving distance of the objective lens.
REFERENCES:
patent: 3733484 (1973-05-01), Bayard
patent: 4168434 (1979-09-01), Lischke et al.
patent: 4376249 (1983-03-01), Pfeiffer et al.
patent: 4431915 (1984-02-01), Nakagawa et al.
patent: 4464571 (1984-08-01), Plies
patent: 4588891 (1986-05-01), Saito
"Design of Electron Beam Scanning Systems Using the Moving Objective Lens", J. Vac. Sci. Technol., 15(3) May/Jun., 1978; Ohiwa, pp. 849-852.
Ohiwa et al., "Elimination of Third-Order Aberrations in Electron-Beam Scanning Systems", Electronics and Comm., vol. 54-B (12), 1971, pp. 44-57.
Goto et al., "MOL (Moving Objective Lens) Formulation of Deflection Aberration Free System", Optik, 48(1977), No. 3, 255-270.
Fields Carolyn E.
Hitachi , Ltd.
Miller John A.
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