Apparatus to inspect TFT substrate and method of inspecting...

Details Apparatus to inspect TFT substrate and method of inspecting... Apparatus to inspect TFT substrate and method of inspecting...

2006-07-03

2008-11-04

Nguyen, Ha T. (Department: 2829)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S754120

Reexamination Certificate

active

07446555

ABSTRACT:
An apparatus to inspect a TFT substrate including a gate line, a data line crossed with the gate line and insulated from the gate line, a TFT disposed at an intersection of the gate line and the data line, and a pixel electrode connected to the TFT includes a vacuum chamber, a stage disposed in the vacuum chamber and on which the TFT substrate is settled, an electron beam generator disposed over the stage, a gate driving part to apply a gate-on voltage to the gate line to turn on the TFT, a signal detector connected to the data line and to sense an electric signal from the pixel electrode, and a controller to control the gate driving part and the electron beam generator so that a electron beam is irradiated to the pixel electrode while the TFT is turned on.

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