Apparatus to dry substrates

Details Apparatus to dry substrates Apparatus to dry substrates

2007-03-20

2007-03-20

Rinehart, Kenneth (Department: 3749)

Drying and gas or vapor contact with solids

Apparatus

With indicating or testing means

C034S351000

Reexamination Certificate

active

11142335

ABSTRACT:
The present invention disclosed herein is an apparatus for drying a substrate. In accordance with the present invention, the apparatus includes a measuring unit to detect a density of IPA vapor at predetermined regions in a process chamber or a pipe. The measuring unit has a radiating unit, a detection unit, and a window unit. The radiating unit transmits infrared-ray in a wavenumber region where light is absorbed by the IPA vapor.

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