Apparatus of regulating shape of focused ion beams

Details Apparatus of regulating shape of focused ion beams Apparatus of regulating shape of focused ion beams

1985-10-02

1987-11-03

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250309, 250397, G01N 2300

Patent

active

047045264

ABSTRACT:
An apparatus for regulating the shape of a focused ion beam irradiates a sample which is comprised of a pattern on a substrate with a scanning ion beam, detectors for detecting two kinds of secondary ions one emitted from the substrate and the other emitted from the pattern, comparators for comparing the detected signals with respective predetermined values and then converting the detected signals into binary signals, and a color display for displaying the shapes of the substrate and the pattern in the form of pictures of different colors on the basis of the binary signals corresponding to each kind of secondary ions. The spot shape of the ion beam is corrected with an astigmatic correction electrode and/or an object lens while observing the shape of the overlapping portions of the pictures of different colors.

REFERENCES:
patent: 3628014 (1971-12-01), Grubic
patent: 3772520 (1973-11-01), Varker
patent: 4041311 (1977-08-01), Martin
patent: 4219731 (1980-08-01), Migitaka et al.
patent: 4503329 (1985-03-01), Yamaguchi et al.
patent: 4560872 (1985-12-01), Antonovsky
patent: 4588890 (1986-05-01), Finnes

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