Apparatus for X-ray analysis of a specimen with local resolution

Details Apparatus for X-ray analysis of a specimen with local resolution Apparatus for X-ray analysis of a specimen with local resolution

1978-07-07

1981-04-28

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250272, 250321, 250365, 250416TV, G01M 2300

Patent

active

042648157

ABSTRACT:
In apparatus for examining the material of a specimen with local resolution employing an X-ray probe and operating according to the scanning principle, including a source of X-ray radiation, an optical system for directing X-ray radiation from the source onto the specimen, and a detector disposed for detecting radiation appearing behind the specimen, the source is constituted by a target in which the X-ray radiation is generated, and the optical system acts to focus the X-ray radiation emanating from the target onto the specimen in the form of an X-ray probe.

REFERENCES:
patent: 1626306 (1927-04-01), St. John
patent: 3229089 (1966-01-01), Sasao
patent: 3801785 (1974-04-01), Barrett
patent: 3961191 (1976-06-01), Stoner
patent: 4057745 (1977-11-01), Albert
patent: 4099055 (1978-07-01), Todokoro

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