Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1996-10-18
1998-06-23
Nguyen, Kiet T.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250306, 250307, 25049221, H01J 3726
Patent
active
057708614
ABSTRACT:
An apparatus for producing a highly accurate three-dimensional image of a solid in the micro order is provided. The apparatus is composed of an ion column, an electron column, a specimen chamber, a specimen stage, a diluent gas ion column, a control system, and so on. The apparatus has the following advantages: (1) correct three-dimensional information can be provided even if a specimen is composed of composite materials; (2) since a worked dimension can be accurately measured, highly accurate three-dimensional observation can be achieved in the micron order; (3) since a plurality of images can be stored for an observed surface, a plurality of three-dimensional images can be produced from a single specimen; and (4) since a side entry stage is employed as a specimen stage, a working column and an observation column can be positioned close to a specimen, so that beams from the respective columns can be well converged, thus making it possible to produce highly accurate three-dimensional images.
REFERENCES:
patent: 4740698 (1988-04-01), Tamura et al.
patent: 5057689 (1991-10-01), Nomura et al.
patent: 5233191 (1993-08-01), Noguchi et al.
patent: 5412210 (1995-05-01), Todokoro et al.
patent: 5525806 (1996-06-01), Iwasaki et al.
patent: 5576542 (1996-11-01), Kaga
patent: 5594245 (1997-01-01), Todokoro et al.
"Bunseki", 1989, No. 1, by Japan Society of Analytical Chemistry, pp. 48-60 .
Hirose Hiroshi
Nomura Setsuo
Hitachi , Ltd.
Nguyen Kiet T.
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