Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2005-01-11
2005-01-11
Tang, Minh N. (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S537000, C324S719000
Reexamination Certificate
active
06842028
ABSTRACT:
In the present invention, an apparatus of testing a leakage protection reliability of an integrated circuit interconnection. The apparatus has at least one comb-like pattern, a serpentine-like pattern and means of applying a bias to the patterns and forms a maximum field region at an interconnection formed around a via, i.e., at the end of a tooth portion composing the comb-like pattern. In one structure of the present invention, the comb-like pattern is formed at one level, and the serpentine-like pattern has a plurality of unit parts corresponding to the tooth portions, respectively, and connection parts connecting the neighboring two unit parts. Each of the unit parts is formed at the same level with the comb-like pattern and spaced apart from the tooth portion by a minimum design length according to a design rule. The unit part has vias formed through an interlayer dielectric layer at the both ends of a tooth parallel part, two tooth parallel parts connected with the vias, respectively, and a length parallel part electrically connecting two tooth parallel parts.
REFERENCES:
patent: 5514974 (1996-05-01), Bouldin
patent: 5900735 (1999-05-01), Yamamoto
patent: 6054721 (2000-04-01), Milor
patent: 6297644 (2001-10-01), Jarvis et al.
Kim Jung-Woo
Kim Sam-Young
Lee Chang-Sub
Park Ki-Chul
Song Won-Sang
Marger & Johnson & McCollom, P.C.
Samsung Electronics Co,. Ltd.
Tang Minh N.
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