Apparatus for supporting semiconductor wafers and semiconductor

Details Apparatus for supporting semiconductor wafers and semiconductor Apparatus for supporting semiconductor wafers and semiconductor

1997-10-15

2000-10-17

Bueker, Richard

Semiconductor device manufacturing: process

Formation of semiconductive active region on any substrate

438584, 4272481, 118500, 118728, C23C 1600

Patent

active

06133121&

ABSTRACT:
A plurality of rods are arranged between first and second plates. A plurality of support members formed of heat-resistant strings, for example, SiC are stretched between the rods and wafers are supported by the support members. The wafers are separated from the rods while they are supported on the support members.

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