Apparatus for supporting a wafer, apparatus for exposing a...

Details Apparatus for supporting a wafer, apparatus for exposing a... Apparatus for supporting a wafer, apparatus for exposing a...

2011-01-04

2011-01-04

Kim, Peter B (Department: 2882)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S030000, C355S053000, C355S073000, C355S075000

Reexamination Certificate

active

07864299

ABSTRACT:
In an apparatus for supporting a wafer, the apparatus may remove particles thereon. The apparatus may include a conductive support configured to support the wafer, and a power source electrically connected to the conductive support, the power source configured to provide at least one current to the conductive support to remove particles from the conductive support.

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