Apparatus for storing and moving a cassette

Details Apparatus for storing and moving a cassette Apparatus for storing and moving a cassette

2005-10-24

2009-12-29

Keenan, James (Department: 3652)

Material or article handling

Apparatus for charging a load holding or supporting element...

C414S217100, C414S806000, C414S940000

Reexamination Certificate

active

07637707

ABSTRACT:
A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall above a cassette docking station, and a cassette mover to carry a cassette between the shelves and the docking station. An interstation transfer apparatus includes an overhead support beam and a transfer arm adapted to carry a cassette between processing stations.

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