Material or article handling – Apparatus for charging a load holding or supporting element...
Reexamination Certificate
2007-06-26
2007-06-26
Fox, Charles A. (Department: 3652)
Material or article handling
Apparatus for charging a load holding or supporting element...
C414S217000
Reexamination Certificate
active
11248375
ABSTRACT:
A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall and vertically disposed relative to a plurality of cassette docking stations, and a cassette mover to carry a cassette between the shelves and the docking stations. An interstation transfer apparatus includes a support beam and a transfer arm adapted to carry a cassette between processing stations.
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Nulman Jaim
Sidi Nissim
Applied Materials Inc.
Dugan & Dugan PC
Fox Charles A.
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