Apparatus for storing and moving a cassette

Material or article handling – Apparatus for charging a load holding or supporting element...

Reexamination Certificate

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Details

C414S217000

Reexamination Certificate

active

11248375

ABSTRACT:
A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall and vertically disposed relative to a plurality of cassette docking stations, and a cassette mover to carry a cassette between the shelves and the docking stations. An interstation transfer apparatus includes a support beam and a transfer arm adapted to carry a cassette between processing stations.

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