Apparatus for storing and moving a cassette

Details Apparatus for storing and moving a cassette Apparatus for storing and moving a cassette

2005-10-18

2005-10-18

Lillis, Eileen D. (Department: 3652)

Material or article handling

Apparatus for charging a load holding or supporting element...

C414S217000

Reexamination Certificate

active

06955517

ABSTRACT:
A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall and vertically disposed relative to a plurality of cassette docking stations, and a cassette mover to carry a cassette between the shelves and the docking stations. An interstation transfer apparatus includes a support beam and a transfer arm adapted to carry a cassette between processing stations.

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