Apparatus for specimen fabrication and method for specimen...

Details Apparatus for specimen fabrication and method for specimen... Apparatus for specimen fabrication and method for specimen...

2005-02-22

2005-02-22

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S306000, C250S307000, C250S492210

Reexamination Certificate

active

06858851

ABSTRACT:
A micro-sample prepared by processing with an ion beam is extracted by a probe and, in this state, a voltage is applied across the probe and a micro-sample holder by a circuit for sending electric current to probe. Thereafter, a probe driver is moved by a probe position controller to cause a portion of the probe distanced from the tip thereof by about 5 μm toward the root side thereof to approach an end surface of an ear portion of the micro-sample holder, so that the probe and the micro-sample holder are fixed together at a bonding point by current welding. Then, by cutting a root-side portion, relative to the bonding point, of the probe using an ion beam, fixation of the micro-sample to the micro-sample holder via the tip of the probe is completed.

REFERENCES:
patent: 5270552 (1993-12-01), Ohnishi et al.
patent: 6538254 (2003-03-01), Tomimatsu et al.
patent: A-9-85437 (1997-03-01), None
patent: A-2000-162102 (2000-06-01), None
patent: A-2000-241319 (2000-09-01), None
patent: A-2002-150990 (2002-05-01), None
patent: WO99-05506 (1999-02-01), None

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