Apparatus for solid surface analysis using X-ray spectroscopy

Details Apparatus for solid surface analysis using X-ray spectroscopy Apparatus for solid surface analysis using X-ray spectroscopy

1992-07-10

1994-11-29

Hannaher, Constantine

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250305, 250306, 250397, 378 44, H01J 3726

Patent

active

053692756

ABSTRACT:
An apparatus for solid surface analysis capable of carrying out the X-ray fluorescence analysis of the sample surface according to the characteristic X-rays detected by the energy dispersive X-ray detector. The apparatus can also obtain an enlarged image of the sample surface according to the secondary electrons emitted from the excited sample surface detected by the electron detector. The apparatus can also carry out an X-ray diffraction analysis of the sample surface according to diffracted X-rays detected by the diffracted X-ray detector. The apparatus is also capable of attaching or detaching the energy dispersive X-ray detector easily by incorporating a connection room which can be put in a vacuum state independent of the vacuum chamber.

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Shuji Hasegawa, et al. Chemical Analysis of Surfaces by Total-Reflection-Angle X-Ray Spectroscopy in RHEED Experiments (RHEED-TRAXS).

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