Apparatus for semiconductor wafer identification

Details Apparatus for semiconductor wafer identification Apparatus for semiconductor wafer identification

1997-06-17

1999-01-26

Le, Thien Minh

Registers

Coded record sensors

Particular sensor structure

235385, G06K 710

Patent

active

058641300

ABSTRACT:
The apparatus (10) includes a batch wafer presentation system (12) receiving a cassette (14) carrying a plurality of wafers (16). The batch wafer presentation system (12) arranges the plurality of wafers (16) along an inclined presentation axis, .alpha., to simultaneously expose the bar code inscription on each wafer (16). A laser scanner (30) is mounted on an arm assembly (32) which travels long a track (34) parallel with the presentation axis. The laser scanner (30) is mounted such that its angular and spatial positions relative to the plurality of wafers (16) may be easily adjusted.

REFERENCES:
patent: 5155882 (1992-10-01), Lau
patent: 5287414 (1994-02-01), Foster
patent: 5340971 (1994-08-01), Rockstein
patent: 5567927 (1996-10-01), Kahn et al.

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