Apparatus for selecting the field of view of a sample

Details Apparatus for selecting the field of view of a sample Apparatus for selecting the field of view of a sample

1976-12-22

1978-07-11

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250399, 250400, 250492R, G01M 2300

Patent

active

041004108

ABSTRACT:
Electric pulses are counted, and are converted into an electric signal proportional to the number of the counted pulses. An electron beam for irradiating a sample is deflected in response to the electric signal. The counting can be voluntarily stopped with a switch.

REFERENCES:
patent: 3341735 (1967-09-01), Briggs
patent: 3758825 (1973-09-01), Kapers
patent: 3889115 (1975-06-01), Tamura et al.

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