Electricity: electrical systems and devices – Discharging or preventing accumulation of electric charge – By charged gas irradiation
Patent
1989-10-13
1991-10-15
Pellinen, A. D.
Electricity: electrical systems and devices
Discharging or preventing accumulation of electric charge
By charged gas irradiation
361216, 361220, 361222, H05F 300
Patent
active
050579665
ABSTRACT:
An apparatus for removing static electricity from charged articles existing in a clean space, particularly in a clean room for the production of semiconductor articles, includes a AC ionizer having a plurality of needle-like emitters disposed in a flow of clean air. A discharge end of each emitter is coated with a dielectric ceramic material. Opposite conductors are also included which are respectively positioned apart from the discharge end of each emitter by a predetermined distance. Each opposite conductor is grounded. Emitters of some of the discharge pairs are connected to a high voltage AC source having added thereto negative voltage bias to thereby form pseudo negative pole emitters, and emitters of the other discharge pairs are connected to a high voltage AC source having added thereto a more positive voltage bias relative to the negative voltage bias to thereby form pseudo positive pole emitters.
REFERENCES:
patent: 4642728 (1987-02-01), Unger
patent: 4757422 (1988-07-01), Bossard et al.
patent: 4864459 (1989-09-01), Larigaldie et al.
"Application of Microporous Glass (MPG) for Cleaning Particles in Gas and Liquid"; International Committee of Contamincation Control Societies (ICCCS), 10th International Symposium on Contamination Control (ICCCA 90), Zurich, Switzerland, 10-14 Sep. 1990.
Okada Takao
Sakata Soichiro
Yoshida Takanori
Gaffin Jeffrey A.
Pellinen A. D.
Takasago Thermal Engineering Co., Ltd.
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