Apparatus for removing pellicles

Details Apparatus for removing pellicles Apparatus for removing pellicles

1987-12-24

1990-02-06

Yost, Frank T.

Cutting

Other than completely through work thickness or through work...

Splitting

83697, 834684, 156584, B26D 328

Patent

active

048980587

ABSTRACT:
An apparatus for removing a pellicle that is adhesively bonded to a photomask. A first embodiment of the invention is provided for removing a pellicle having a generally rectangular shape. The photomask is placed in a housing with the pellicle facing down. A pair of blades are mounted on a carriage that are longitudinally movable within the housing. The blades are adjustable such that the cutting edges are immediately below the surface of the photomask. The carriage is driven by a rack and pinion assembly causing the blades to cut through the adhesive layer bonding the pellicle to the photomask. A second embodiment of the invention is provided for removing a pellicle having a generally circular shape. In this embodiment, the blades are mounted on a rotating bar. Rotation of the bar causes the blades to cut through the adhesive layer bonding the pellicle to the photomask.

REFERENCES:
patent: 24265 (1859-05-01), Messer
patent: 518774 (1894-04-01), Bayley
patent: 534746 (1895-02-01), Jarves
patent: 820975 (1906-05-01), Holmes et al.
patent: 1906358 (1933-05-01), Bedell
patent: 2685901 (1954-08-01), Putzer
patent: 2821254 (1958-01-01), Kerner
patent: 3340916 (1967-09-01), Burch
patent: 3689396 (1972-09-01), Casagrande et al.
patent: 4255216 (1981-03-01), Conant et al.
patent: 4466852 (1984-08-01), Beltz et al.

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