Apparatus for removing fine particles during fabrication of...

Metal working – Barrier layer or semiconductor device making

Reexamination Certificate

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Details

C118S045000, C118S056000, C118S207000, C118S216000, C118S237000, C118S256000, C118S504000, C438S014000, C438S759000

Reexamination Certificate

active

10835635

ABSTRACT:
An apparatus and a method adapted for shielding and removing fine particles for a portable camera module generated during a portable camera module fabricating process. The portable camera module includes an image sensor and an infrared ray filter. The apparatus includes a tape attaching device for attaching a surface protective tape on a surface of the infrared ray filter so as to prevent fine particles from being attached to the surface of the infrared ray filter, and a tape detaching device movably installed above the surface protective tape in order to detach the surface protective tape having fine particles shielded from the surface of the infrared ray filter. The fine particles are attached to the surface protective tape, which remains shielding the surface of the infrared ray filter during the holder attaching, primary heat treatment, secondary heat treatment, and under filling processes are subsequently carried out. The tape detaching device is moved downward to attach to the surface of the protective tape using vacuum, and is moved upwardly to separate the surface protective tape from the surface of the infrared ray filter, while the vacuum is still being applied.

REFERENCES:
patent: 3438833 (1969-04-01), Nakano
patent: 5820725 (1998-10-01), Maeda et al.
patent: 6576057 (2003-06-01), Wensel
patent: 6752896 (2004-06-01), Ong et al.
patent: 2003/0079842 (2003-05-01), Behnke
patent: 2003/0190795 (2003-10-01), Kawakami
patent: 2004/0009650 (2004-01-01), Jeong et al.
patent: 2004/0121514 (2004-06-01), Yoo et al.

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