Apparatus for rapid filling of a processing volume

Details Apparatus for rapid filling of a processing volume Apparatus for rapid filling of a processing volume

2011-05-31

2011-05-31

Lee, Kevin L (Department: 3753)

Fluid handling

Processes

Involving pressure control

C137S240000

Reexamination Certificate

active

07950407

ABSTRACT:
A method and apparatus for supplying greater fluid flow and/or fluid volume from a fluid provided from a facility source to a substrate processing chamber is provided. The apparatus couples to an existing facility fluid source and accumulates the fluid, and the flow characteristics of the accumulated fluid are enhanced for delivery to the processing chamber. The apparatus includes a tank in fluid communication with the facility source and one or more processing chambers, and a valve disposed between the tank and the processing chambers adapted to receive a signal from a controller to facilitate filling or draining of the tank. The apparatus and method affects cost of ownership by altering the pressure and/or volume of the existing facility source without the need to alter the facility source.

REFERENCES:
patent: 1927677 (1927-01-01), Bennington
patent: 3206041 (1965-09-01), McGrath
patent: 3351219 (1967-11-01), Ruderfer
patent: 3402835 (1968-09-01), Saul
patent: 3610159 (1971-10-01), Fickenscher
patent: 3750804 (1973-08-01), Lemelson
patent: 3796327 (1974-03-01), Meyer et al.
patent: 3876085 (1975-04-01), Bright
patent: 4027246 (1977-05-01), Caccoma et al.
patent: 4830888 (1989-05-01), Kobayashi et al.
patent: 4846623 (1989-07-01), Otani et al.
patent: 4911761 (1990-03-01), McConnell et al.
patent: 4923054 (1990-05-01), Ohtani et al.
patent: 4984597 (1991-01-01), McConnell et al.
patent: 5054332 (1991-10-01), Terauchi et al.
patent: 5061144 (1991-10-01), Akimoto et al.
patent: 5197846 (1993-03-01), Uno et al.
patent: 5308210 (1994-05-01), Ohtani et al.
patent: 5339128 (1994-08-01), Tateyama et al.
patent: 5359785 (1994-11-01), Fukutomi et al.
patent: 5386927 (1995-02-01), Janssen
patent: 5415890 (1995-05-01), Kloiber et al.
patent: 5416047 (1995-05-01), Konishi et al.
patent: 5430271 (1995-07-01), Orgami et al.
patent: 5436848 (1995-07-01), Nishida et al.
patent: 5443348 (1995-08-01), Biche et al.
patent: 5485644 (1996-01-01), Shinbara et al.
patent: 5571325 (1996-11-01), Ueyama et al.
patent: 5634377 (1997-06-01), Kimura et al.
patent: 5639301 (1997-06-01), Sasada et al.
patent: 5651823 (1997-07-01), Parodi et al.
patent: 5665200 (1997-09-01), Fujimoto et al.
patent: 5668733 (1997-09-01), Morimoto et al.
patent: 5687085 (1997-11-01), Morimoto et al.
patent: 5700046 (1997-12-01), Van Doren et al.
patent: 5701627 (1997-12-01), Matsumura et al.
patent: 5730574 (1998-03-01), Adachi et al.
patent: 5733024 (1998-03-01), Slocum et al.
patent: 5762745 (1998-06-01), Hirose
patent: 5766824 (1998-06-01), Batchelder et al.
patent: 5788868 (1998-08-01), Itaba et al.
patent: 5803932 (1998-09-01), Akimoto et al.
patent: 5823736 (1998-10-01), Matsumura
patent: 5838121 (1998-11-01), Fairbairn et al.
patent: 5875804 (1999-03-01), Tanaka et al.
patent: 5884640 (1999-03-01), Fishkin et al.
patent: 5915396 (1999-06-01), Kinose
patent: 5919529 (1999-07-01), Matsumura
patent: 5921257 (1999-07-01), Weber et al.
patent: 5935768 (1999-08-01), Biche et al.
patent: 5943880 (1999-08-01), Tateyama
patent: 5944043 (1999-08-01), Glick et al.
patent: 5960225 (1999-09-01), Fujimoto
patent: 5963753 (1999-10-01), Ohtani et al.
patent: 5970717 (1999-10-01), Tateyama
patent: 5974682 (1999-11-01), Akimoto
patent: 5989346 (1999-11-01), Hiroki
patent: 5992431 (1999-11-01), Weber et al.
patent: 6004047 (1999-12-01), Akimoto et al.
patent: 6012192 (2000-01-01), Sawada et al.
patent: 6021790 (2000-02-01), Yoshitani et al.
patent: 6026986 (2000-02-01), Choi et al.
patent: 6027574 (2000-02-01), Fishkin et al.
patent: 6051101 (2000-04-01), Ohtani et al.
patent: 6063439 (2000-05-01), Semba et al.
patent: 6074515 (2000-06-01), Iseki et al.
patent: 6076652 (2000-06-01), Head, III
patent: 6077321 (2000-06-01), Adachi et al.
patent: 6099643 (2000-08-01), Ohtani et al.
patent: 6108932 (2000-08-01), Chai
patent: 6128829 (2000-10-01), Wolke et al.
patent: 6138695 (2000-10-01), Shibao et al.
patent: 6142722 (2000-11-01), Genov et al.
patent: 6143087 (2000-11-01), Walter
patent: 6155275 (2000-12-01), Shinbara
patent: 6176667 (2001-01-01), Fairbairn et al.
patent: 6251195 (2001-06-01), Wagener et al.
patent: 6253118 (2001-06-01), Koyama
patent: 6261007 (2001-07-01), Takamori et al.
patent: 6292250 (2001-09-01), Matsuyama
patent: 6293719 (2001-09-01), Ueda
patent: 6313903 (2001-11-01), Ogata
patent: 6318948 (2001-11-01), Ueda et al.
patent: 6328814 (2001-12-01), Fishkin et al.
patent: 6348101 (2002-02-01), Walter
patent: 6371713 (2002-04-01), Nishimura et al.
patent: 6379056 (2002-04-01), Ueda
patent: 6402400 (2002-06-01), Ueda et al.
patent: 6402508 (2002-06-01), Harada et al.
patent: 6403924 (2002-06-01), Hayashi
patent: 6438449 (2002-08-01), Kawamatsu et al.
patent: 6444029 (2002-09-01), Kimura et al.
patent: 6446646 (2002-09-01), Izumi
patent: 6454332 (2002-09-01), Govzman et al.
patent: 6464789 (2002-10-01), Akimoto
patent: 6471422 (2002-10-01), Ueda et al.
patent: 6475279 (2002-11-01), Akimoto
patent: 6491491 (2002-12-01), Tsuneda et al.
patent: 6491763 (2002-12-01), Verhaverbeke et al.
patent: 6507770 (2003-01-01), Tateyama et al.
patent: 6511315 (2003-01-01), Hashimoto
patent: 6526329 (2003-02-01), Tateyama et al.
patent: 6533531 (2003-03-01), Nguyen et al.
patent: 6539956 (2003-04-01), Wolke et al.
patent: 6556893 (2003-04-01), Kumar et al.
patent: 6568847 (2003-05-01), Nishijima et al.
patent: 6575177 (2003-06-01), Brown et al.
patent: 6616394 (2003-09-01), Park
patent: 6616762 (2003-09-01), Inada et al.
patent: 6658053 (2003-12-01), Aiello et al.
patent: 6659661 (2003-12-01), Deguchi et al.
patent: 6672779 (2004-01-01), Ueda et al.
patent: 6676757 (2004-01-01), Kitano et al.
patent: 6691430 (2004-02-01), Saito et al.
patent: 6694224 (2004-02-01), Ramanan
patent: 6703316 (2004-03-01), Inoue et al.
patent: 6712579 (2004-03-01), Fujii et al.
patent: 6713239 (2004-03-01), Toshima et al.
patent: 6726848 (2004-04-01), Hansen et al.
patent: 6736556 (2004-05-01), Kanagawa
patent: 6746544 (2004-06-01), Fishkin et al.
patent: 6752543 (2004-06-01), Fukutomi et al.
patent: 6790286 (2004-09-01), Nishimura et al.
patent: 6790287 (2004-09-01), Shiga et al.
patent: 6790291 (2004-09-01), Kimura
patent: 6822413 (2004-11-01), Simondet
patent: 6832863 (2004-12-01), Sugimoto et al.
patent: 6834210 (2004-12-01), Tateyama et al.
patent: 6837632 (2005-01-01), Koyama et al.
patent: 6841031 (2005-01-01), Iwata et al.
patent: 6851872 (2005-02-01), Okubo et al.
patent: 6868888 (2005-03-01), Adachi
patent: 6893171 (2005-05-01), Fukutomi et al.
patent: 6955516 (2005-10-01), Achkire et al.
patent: 2001/0024691 (2001-09-01), Kimura et al.
patent: 2003/0200988 (2003-10-01), Brown et al.
patent: 2004/0055625 (2004-03-01), Fishkin et al.
patent: 2004/0091349 (2004-05-01), Tabrizi et al.
patent: 2005/0229426 (2005-10-01), Achkire et al.
patent: 2005/0241684 (2005-11-01), Achkire et al.
patent: 2008/0166208 (2008-07-01), Lester et al.
patent: 2009/0029560 (2009-01-01), Hansen et al.

Affiliated with

Also associated with

Rating

Apparatus for rapid filling of a processing volume does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for rapid filling of a processing volume, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for rapid filling of a processing volume will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2667186