Apparatus for pulling up single crystals and single crystal clam

Details Apparatus for pulling up single crystals and single crystal clam Apparatus for pulling up single crystals and single crystal clam

1998-06-02

2000-08-08

Hiteshew, Felisa C.

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

For crystallization from liquid or supercritical state

117 14, 117201, 117202, 117218, 117911, C30B 3500

Patent

active

060996420

ABSTRACT:
An object of the invention is to provide a single crystal clamping device and a single crystal supporting method. The single crystal clamping device does not become inclined and does not vibrate, and the center of the single crystal clamping device is congruous to the center of the growing single crystal. An apparatus for pulling up single crystals of the present invention, comprises: a single crystal pulling up wire for pulling up a seed crystal immersed in a melt of a raw material; a single crystal clamping device for clamping one end of the single crystal grown beneath the seed crystal; a wire-winding mechanism fixed on the single crystal clamping means and winding up the single crystal pulling up wire so as to adjust a speed of the single-crystal pulling up wire corresponding to the ascending/descending speeds of the single crystal clamping device; a pulling up wire-load cell for detecting the load applied on the crystal; and a summation load cell for measuring the combined load applied on the crystal pulling up wire and the single crystal clamping device.

REFERENCES:
patent: 5725660 (1998-03-01), Hiraishi et al.
patent: 5824153 (1998-10-01), Suda
patent: 5858088 (1999-01-01), Hiraishi et al.
patent: 5879448 (1999-03-01), Urano et al.
patent: 5879451 (1999-03-01), Mizuishi
patent: 5882397 (1999-03-01), Iino et al.

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