Apparatus for preparing oxide superconducting film

Details Apparatus for preparing oxide superconducting film Apparatus for preparing oxide superconducting film

1991-03-01

1993-02-16

Chin, Peter

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

118620, 2191216, 21912136, C23C 1600

Patent

active

051871483

ABSTRACT:
In order to enable formation of a smooth and dense oxide superconducting film with no clear appearance of grain boundaries in a fine structure even at a high film forming rate, a laser ablation method is employed to apply a laser beam 2 to a target 1 containing components of an oxide superconductive material and deposit particles, which are thus scattered from the target 1, on a substrate 3, while gaseous oxygen is supplied from a gaseous oxygen inlet 7 toward laser plasma 6, which is generated by the application of the laser beam 2.

REFERENCES:
patent: 5015492 (1991-05-01), Venkatesan
patent: 5019552 (1991-05-01), Balooch et al.
M. Balooch et al. "Y-Ba-Cu-O Superconducting Films Produced By Long-pulse Laser Vaporization", 55 Applied Physics Letters 2, pp. 197-199 (1989).
S. Witanachchi et al. "Deposition of Superconducting Y-Ba-Cu-O Films at 400.degree. C. Without Post-annealing", 53 Applied Physics Letters 3, pp. 234-236 (1988).

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