Apparatus for positioning an optical element in a structure

Details Apparatus for positioning an optical element in a structure Apparatus for positioning an optical element in a structure

2007-07-31

2007-07-31

Harrington, Alicia M. (Department: 2873)

Optical: systems and elements

Lens

With support

C359S819000, C359S822000, C359S823000

Reexamination Certificate

active

11262360

ABSTRACT:
In an apparatus for positioning an optical element in a structure, particularly in an objective housing of a projection objective for microlithography, the optical element is connected to the structure via fastening elements. The position of the optical element is set by means of adjusting fasteners. The fastening elements are arranged in such a way and the adjusting fasteners can be actuated in such a way that the optical element can be tilted about three mutually independent axes and can additionally be displaced in a translatory fashion in one axial direction.

REFERENCES:
patent: 5909324 (1999-06-01), Bryant et al.
patent: 6163417 (2000-12-01), Nunnally
patent: 6538829 (2003-03-01), Rau et al.
patent: 6571041 (2003-05-01), Bourcier et al.
patent: 6754013 (2004-06-01), Willis
patent: 199 01 295 (2000-07-01), None
patent: WO 99/66361 (1999-12-01), None

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