Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1983-09-19
1985-12-24
Smith, Alfred E.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
2504421, 2504922, 219121EN, 219121EQ, 219121EX, 219121EY, H01J 3718, H01J 3720, H01J 3302
Patent
active
045608806
ABSTRACT:
Apparatus for positioning a semiconductor wafer with respect to a localized vacuum envelope so as to maintain a prescribed gap between the tip of the vacuum envelope and the wafer includes an x-y table, a stage assembly movable along the z-axis for holding the wafer and a z-axis actuator assembly. The z-axis actuator assembly includes a plurality of fluid-containing bellows coupled between the x-y table and the stage assembly and a hydraulic controller operated by a linear stepper motor for varying the fluid volume in each of the bellows in response to an actuator control signal so as to move the stage assembly along the z-axis. The z-axis actuator assembly can further include a flexible disk positioned in the plane of x-y movement and coupled between the x-y table and the stage assembly for preventing lateral and rotational movement of the stage assembly relative to the x-y table. The positioning apparatus is suitable for use in an electron beam lithography system.
REFERENCES:
patent: 4191385 (1980-03-01), Fox
patent: 4342900 (1982-08-01), Susei et al.
patent: 4344160 (1982-08-01), Gabriel et al.
patent: 4358657 (1982-11-01), Steigerwald et al.
Lewis et al., "A Laser Interferometer Controlled X,Y Air Bearing for Direct Wafer Exposure Electron Beam Lithography," Proc. 10th Int. Conf. on Electron and Ion Beam Science and Technology, p. 477 (1982).
Fox, "Planar Vacuum Seal for Isolating an Air Bearing," U.S. Ser. No. 107,207, filed Dec. 16, 1979 (Corresponding PCT Appl. No. US80/01718, published Jul. 8, 1982).
Foley Michael S.
Milgate, III Robert W.
Petric Paul F.
Waz John J.
Berman Jack I.
Cole Stanley Z.
McClellan William R.
Smith Alfred E.
Varian Associates Inc.
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