Optics: measuring and testing – By light interference – Having polarization
Reexamination Certificate
2007-10-02
2007-10-02
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
Having polarization
C356S491000
Reexamination Certificate
active
10883739
ABSTRACT:
A device for polarization-specific examination of an optical system having a detector part that has polarization detector means for recording the exit state of polarization of radiation emerging from the optical system. Also, an associated optical imaging system, and a calibration method for the device. The device includes a polarization detector with a polarizing grating structure. Provided as an alternative is a device for snapshot polarimetry having a birefringent element and downstream polarizer element that adequately polarizes nonquasi-parallel radiation. The device may be used for determining the influence on the state of polarization of UV radiation by a microlithographic projection objective.
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Mengel Markus
Wegmann Ulrich
Carl Zeiss SMT AG
Lyons Michael A
Sughrue Mion Pllc.
Toatley , Jr. Gregory J.
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