Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2006-01-17
2006-01-17
Olsen, Kaj K. (Department: 1753)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S409000
Reexamination Certificate
active
06986835
ABSTRACT:
A method and apparatus for analyzing plating solutions. The apparatus generally includes a plating cell, a reference electrolyte input, one or more external additive pumps, and a process controller. In one embodiment, the plating cell includes a cavity therein having a larger volumetric portion adjacent a smaller volumetric portion adapted to hold one or more solutions therein. The plating cell also includes a base disposed adjacent the bottom of the plating cell and adapted to receive and mix one or more test solutions as part of the plating solution analysis. In one configuration, the base includes electrical ports adapted to connect stimulation signals to a working electrode, counter electrode, and reference electrode disposed within the cell. The base also includes a thermal sensor in thermal contact with test solutions contained within the vessel.
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Balisky Todd Alan
Cameron Donald A.
Sun Zhi-Wen
Applied Materials Inc.
Olsen Kaj K.
Patterson & Sheridan
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