Coating apparatus – Gas or vapor deposition – With treating means
Patent
1995-10-17
1997-11-25
Breneman, R. Bruce
Coating apparatus
Gas or vapor deposition
With treating means
118715, 118723MP, 118 501, 156345, 31511121, 427237, 427238, C23C 1600
Patent
active
056907451
ABSTRACT:
A treatment chamber (1) evacuable by vacuum pumps (13,13') has a mounting (26,26', . . .) bearing the hollow body (4) in the treatment chamber (1), and a line (9,9') for the admission of a process gas into the treatment chamber (1). A microwave conductor (20,20' . . .) is connected with a generator (19,19' . . .) for igniting a plasma in the area of channels formed by a sheet-metal shroud (2,2') matching the configuration of the hollow body (4). A closure (7,7') is provided through which the filler opening (6, 6') of the hollow body (4) can be closed pressure-tight, and a line (9,9') for the process gas passes through the closure.
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Boll Siang-Hong
Grunwald Heinrich
Kloberdanz Hermann
Lacher Roland
Breneman R. Bruce
Leybold AG
Lund Jeffrie R.
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