Apparatus for piece-by-piece development corresponding to large

Details Apparatus for piece-by-piece development corresponding to large Apparatus for piece-by-piece development corresponding to large

1994-10-05

1998-05-19

Duda, Kathleen

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430325, G03F 730

Patent

active

057534152

ABSTRACT:
A piece-by-piece, passing type development apparatus corresponding to large scale substrates comprises a pipe for ejecting a developing solution and means for applying the developing solution ejected from the pipe onto a substrate as continuous fluid.

REFERENCES:
patent: 3884183 (1975-05-01), Sprung, Jr.
patent: 4938994 (1990-07-01), Choinski
Patent Abstracts of Japan, vol. 13, No. 309 (Jul. 14, 1987) (P-898).
Patent Abstracts of Japan, vol. 12, No. 396 (Oct. 21, 1988) (P-774).

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