Apparatus for opening/closing a process chamber door of ovens us

Details Apparatus for opening/closing a process chamber door of ovens us Apparatus for opening/closing a process chamber door of ovens us

1997-12-22

2000-09-05

Weier, Anthony J.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

432250, A23F 102, F27D 118

Patent

active

061137340

ABSTRACT:
An apparatus for opening/closing a process chamber door of an oven for manufacturing a semiconductor device includes a boss formed at one side of an opening of the process chamber, a shaft which passes freely through the center of the boss, bearings attached to the process chamber and rotatably supporting the ends of the shaft, a driver for rotating the shaft in opposite directions over a predetermined angle, and a door that seals the opening, one side of the door being attached to the shaft so as to be moved when the shaft rotates. Alternatively, the present invention provides a pair of bearings disposed beside one side of an opening of the process chamber, a shaft whose ends are rotatably supported by the bearings, a bracket having one end fixed to the shaft, and another end fixed to the door. A driver also rotates the shaft over a predetermined angle that opens and closes the door.

REFERENCES:
patent: 5674123 (1997-10-01), Roberson, Jr. et al.

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