Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1985-12-24
1988-02-23
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158F, 324 725, G01R 1067
Patent
active
047273194
ABSTRACT:
A probe apparatus is provided for on-wafer testing of an electrical circuit, the probe apparatus comprising a base plate formed from an electrically conductive material, the base plate including top and bottom surfaces; a substrate formed from a dielectric material, the substrate including top and bottom surfaces, the top surface of the substrate being electrically connected to the bottom surface of the base plate; at least one microstrip transmission line secured to the bottom surface of the substrate, the microstrip line including a first end and a second end; a coaxial connector including a center conductor in electrical contact with the first end of the microstrip transmission line; and a needle probe electrically connected to the second end of the microstrip transmission line, the needle probe extending in a direction substantially away from the base plate.
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patent: 4566594 (1986-01-01), Sleger et al.
patent: 4574235 (1986-03-01), Kelly et al.
patent: 4574236 (1986-03-01), Hechtman
"A Microwave Prober for MMIC Chips", by Wilson, Abstracts of 1982 GaAs IC Symposium, pp. 156-159.
"Conductive Epoxy Encapsulated Wafer Probe", Valentine et al, 4/1978, IBM Tech. Disc. Bull., vol. 20, #11B, pp. 4797-4798.
"A Neutron Hardness Assurance Screen Based on High-Frequency Probe Measurements", Bailey et al, IEEE Transact. on Nuclear Science, vol. NS-23, #6, pp. 2020-2023.
"Microcircuitry Test Probe", by Jennicke et al, IBM Tech. Disc. Bull., vol. 12, #9, 2/70, p. 1435.
"High Voltage Probe for Liquid Immersion", by Harris, Rev. Sci. Instrum., vol. 45, #7, 7/74, pp. 961-962.
Burns W.
Eisenzopf Reinhard J.
Hughes Aircraft Company
Karambelas A. W.
Meltzer M. J.
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