Abrading – Machine – Rotary tool
Patent
1997-07-11
1999-04-13
Scherbel, David A.
Abrading
Machine
Rotary tool
414940, 312273, B24B 2900
Patent
active
058937951
ABSTRACT:
A loading apparatus includes a cassette loader with a cassette support plate that can extend through a window of an enclosure. A cassette on the support plate can be moved through the window. A motor rotates the support plate to place the cassette in position to be lifted by a robotic arm and transferred to a holding tub. When the support plate is rotated, a shield moves to a position to close the window.
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Gantvarg Eugene
Perlov Ilya
Applied Materials Inc.
Hoffmann Philip J.
Scherbel David A.
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