Apparatus for mounting an optical element in an optical system

Details Apparatus for mounting an optical element in an optical system Apparatus for mounting an optical element in an optical system

2005-03-22

2005-03-22

Smith, Zandra V. (Department: 2877)

Optics: measuring and testing

Position or displacement

C359S819000, C359S820000

Reexamination Certificate

active

06870632

ABSTRACT:
An apparatus or mounting an optical element in an optical system, in particular a mirror or a lens, in a projection exposure machine, in particular a projection lens in semiconductor lithography, is connected to an external base structure with the aid of at least three articulation sites that are arranged on the circumference of the optical element and at which a bearing device acts in each case, wherein the bearing device has at least one bending element, resembling a leaf spring, arranged tangentially to the optical element, and at least one bending element, resembling a leaf spring, arranged in the radial direction relative to the optical element.

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U.S. Appl. No. 10/106,962, filed Mar. 25, 2002, Petasch et al.

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