Apparatus for morphological observation of a sample

Details Apparatus for morphological observation of a sample Apparatus for morphological observation of a sample

1993-05-21

1995-01-17

Dzierzynski, Paul M.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 37256

Patent

active

053827961

ABSTRACT:
The present invention aims at providing an apparatus for morphological observation of a sample or easily identifying a luminous part of a sample. This morphological observation apparatus comprises an illumination system 3 for bombarding charged particles to a sample, a photon detector system for receiving light generated from a luminous part of the sample due to illumination of the charged particles, a photomultiplier tube 7 for detecting electrons coming from various parts of the sample upon illumination of the charged particles in such various ways as to correspond to a surface structure of the sample, and a signal processing unit for superimposing morphological signal, in which a morphological image of the sample 5 and an image of the luminous part are superimposed one upon the other, in accordance with a signal of the photon detector system 9 and a detection signal of a photomultiplier tube 7, and a television monitor 19 for displaying the luminous part of the sample 5 and the morphological image in a superimposed condition relative to each other in accordance with the superimposed signal.

REFERENCES:
patent: 4041311 (1977-08-01), Martin
patent: 4146788 (1979-03-01), Mirkin et al.
patent: 4560872 (1985-12-01), Antonovsky

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