Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2007-02-27
2007-02-27
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S234000, C250S235000, C250S306000, C250S307000, C250S216000, C356S370000
Reexamination Certificate
active
11067609
ABSTRACT:
Apparatus and techniques are provided for modifying and measuring surfaces of diamond workpieces and other workpieces with nanoscale precision. The apparatus and techniques exploit scanning probe microscopy (SPM) and atomic force microscopy (AFM) at a wide range of operating temperatures. In some embodiments, the SPM/AFM apparatus also includes an interferometric microscope and/or acoustic-wave microscope for making high-precision measurements of workpiece surfaces.
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Hashmi Zia R.
Metadigm LLC
Townsend and Townsend / and Crew LLP
Wells Nikita
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