Apparatus for measuring of thin dielectric layer properties...

Details Apparatus for measuring of thin dielectric layer properties... Apparatus for measuring of thin dielectric layer properties...

2006-04-25

2006-04-25

Nguyen, Vinh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

07034563

ABSTRACT:
The invention relates to metrology of thin dielectric layers on semiconductor wafers, interfaces of dielectric layers to the wafer substrates and substrates properties of semiconductor wafers. The invention allows measurement of the metrology data for thin dielectric layers on semiconductor wafers electrically via using contact electrodes that align their contact surface to the wafer surface locally at the measurement sites.

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