Apparatus for measuring horizontal level of a wafer chuck

Details Apparatus for measuring horizontal level of a wafer chuck Apparatus for measuring horizontal level of a wafer chuck

2006-11-07

2006-11-07

Guadalupe-McCall, Yaritza (Department: 2859)

Geometrical instruments

Gauge

Straightness, flatness, or alignment

C033S549000, C033S613000, C033S365000

Reexamination Certificate

active

07131209

ABSTRACT:
An apparatus for measuring a horizontal level of a wafer chuck, including a measuring part for contacting the wafer chuck to measure a horizontal level, a mounting part on which the measuring part is mounted, and a supporting part for supporting the mounting part. The measuring part may include a center gage and a plurality of edge gages.

REFERENCES:
patent: 3110112 (1963-11-01), Dalgleish
patent: 3899832 (1975-08-01), Hunyar
patent: 4255862 (1981-03-01), Nakamura
patent: 4821425 (1989-04-01), Currie et al.
patent: 4916824 (1990-04-01), Shimazutsu et al.
patent: 4934064 (1990-06-01), Yamaguchi et al.
patent: 5048195 (1991-09-01), Leonov
patent: 5101835 (1992-04-01), DelRe
patent: 5231767 (1993-08-01), Brinley
patent: 5535143 (1996-07-01), Face
patent: 5822877 (1998-10-01), Dai
patent: 5826345 (1998-10-01), Hendricks
patent: 5974679 (1999-11-01), Birang et al.
patent: 5996946 (1999-12-01), Bailey
patent: 6442857 (2002-09-01), Atsuhiko et al.
patent: 6499367 (2002-12-01), Saeki
patent: 6536128 (2003-03-01), Glanzmann
patent: 6634114 (2003-10-01), Bidwell
patent: 6701633 (2004-03-01), Ohtsuka
patent: 6826840 (2004-12-01), Lindsey et al.
patent: 990076333 (1999-10-01), None
patent: 2000-0011628 (2000-07-01), None

Affiliated with

Also associated with

Rating

Apparatus for measuring horizontal level of a wafer chuck does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for measuring horizontal level of a wafer chuck, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for measuring horizontal level of a wafer chuck will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3648914