Apparatus for material surface observation

Details Apparatus for material surface observation Apparatus for material surface observation

1991-01-09

1992-05-05

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250309, 250310, G01N 2304

Patent

active

051110431

ABSTRACT:
An apparatus of material surface observation related to the present invention is a scanning electron microscope which is combined with an accelerator of charged particles. The material surface is activated by irradiation of the charged particles and a surface reaction is induced. Secondary electron in generated by irradiation of the scanning electron beam depending on a shape of the material surface. The secondary electron generated by the irradiation of the scanning electron beam is discriminated from the secondary electrode generated by the irradiation of the charged particles, and only a signal of the secondary electron generated by the irradiation of the scanning electron beam is visualized. Consequently, a reaction process of the material surface which is activated or is reaction-induced by the irradiation of the charged particles can be observed in atomic level with less noise.

REFERENCES:
patent: 3974390 (1976-08-01), Morita et al.
patent: 4031388 (1977-06-01), Morita et al.
patent: 4052614 (1977-10-01), Fletcher et al.
patent: 4453086 (1984-06-01), Grobman
patent: 4837435 (1989-06-01), Sakuhara et al.
patent: 5003815 (1991-04-01), Martin et al.

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