Apparatus for manufacturing silicon single crystals

Details Apparatus for manufacturing silicon single crystals Apparatus for manufacturing silicon single crystals

1992-04-02

1993-12-14

Chaudhuri, Olik

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Including specific material of construction

1566204, 422249, C30B 1522

Patent

active

052700208

ABSTRACT:
A silicon single crystal manufacturing apparatus according to the CZ method which includes a partition member for dividing a quartz crucible into a single crystal growing section and a material melting section and having at least one small hole for permitting the passage of molten silicon, and a heat keeping cover for covering the partition member and the material melting section. The heat keeping cover is made of a sheet of metal selected from the group consisting of Ta, Mo and W and containing Fe 50 ppm or less and Cu 10 ppm or less. The metal sheet includes a surface layer composed of a silicon-enriched layer, and the depth of an area of the silicon-enriched layer in which the content of Si is greater than the contents of Fe and Cu at the same position therein is not less than 10 .mu.m from the surface. The content of Fe in the silicon-enriched layer is not greater than 5 ppm. Thus, this is the apparatus for manufacturing silicon single crystals, being very low in oxidation induced stacking fault (OSF) density.

REFERENCES:
patent: 3953174 (1976-04-01), LaBelle, Jr.
patent: 4330362 (1982-05-01), Zulehner
patent: 4416723 (1983-11-01), Pelts et al.
patent: 4957712 (1990-09-01), Shima et al.
patent: 5009863 (1991-04-01), Shima et al.
patent: 5087321 (1992-02-01), Kamio et al.

Affiliated with

Also associated with

Rating

Apparatus for manufacturing silicon single crystals does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for manufacturing silicon single crystals, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for manufacturing silicon single crystals will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1703152