Glass manufacturing – Fusion bonding means
Patent
1998-10-27
1999-07-27
Griffin, Steven P.
Glass manufacturing
Fusion bonding means
65155, 65158, 65160, 65162, 65271, 65273, 6537412, 65 2912, 65 57, C03B 2320
Patent
active
059283998
ABSTRACT:
An apparatus for manufacturing a chamber, the chamber including first and second glass substrates and an enclosure arranged between the substrates or an enclosure and at least one spacer arranged between the substrates. The apparatus includes a pair of heating plates, having heaters therein, for holding the glass substrates, a temperature controller for controlling the temperature of the heaters, a position alignment device for moving at least one of the pair of heating plates in X-, Y-, and .theta.-directions, a first driving device for driving the position alignment device, a second driving device for moving at least one of the pair of heating plates in a Z-direction, an image monitoring device for monitoring the positions of the first and second substrates, and a control device for supplying a command to one of the first and second driving devices on the basis of information supplied from the image monitoring device
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Kubota Tomoyuki
Yakou Takeshi
Canon Kabushiki Kaisha
Griffin Steven P.
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