Apparatus for loading and unloading a furnace

Details Apparatus for loading and unloading a furnace Apparatus for loading and unloading a furnace

1981-12-30

1984-04-03

Spar, Robert J.

Material or article handling

Chamber of a type utilized for a heating function and...

Charging of chamber

414786, H01L 21324

Patent

active

044405383

ABSTRACT:
A device to load semiconductor wafers into a furnace when the wafers are contained in a boat, the device including a tower movable horizontally on rails and a ram mounted on the tower to be independently movable horizontally so that the joint movement of the ram and the tower provide a telescoping effect, the ram also being tiltable in a vertical plane to a position with its end higher than the portion attached to the tower whereby a boat carrier held on the end of the ram in its tilted position can be placed in the furnace, lowered into contact with the furnace floor by moving the ram to a horizontal position and then retracted without causing sliding of the boat carrier against the furnace floor.

REFERENCES:
patent: 3870510 (1975-03-01), Martin et al.
patent: 3889821 (1975-06-01), Bowers et al.
patent: 4008815 (1977-02-01), Fisk

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