Apparatus for irradiating a specimen by an electron beam

Details Apparatus for irradiating a specimen by an electron beam Apparatus for irradiating a specimen by an electron beam

1978-01-27

1979-02-13

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250457, 250310, 250492A, H01J 3716

Patent

active

041397746

ABSTRACT:
A specimen chamber is which a specimen to be irradiated by an electron beam is arranged is evacuated by an evacuation device. The evacuation device includes a nonvaporative bulk getter vacuum pump and an oil rotary pump. The oil rotary pump is used for evacuating the specimen chamber from the atmospheric pressure to 10.sup.-1 - 10.sup.-2 Torr, while the nonvaporative bulk getter vacuum pump is used for continuously evacuating the specimen chamber to 10.sup.-5 - 10.sup.-6 Torr. The steady vacuum of 10.sup.-5 - 10.sup.-6 Torr is maintained by only the nonvaporative bulk getter vacuum pump.

REFERENCES:
patent: 2284710 (1942-06-01), Zworykin et al.
patent: 3233823 (1966-02-01), Asamaki
patent: 3401345 (1968-09-01), Petersilka et al.
patent: 3668393 (1972-06-01), Ranch

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