Apparatus for integrated gas and radiation delivery

Details Apparatus for integrated gas and radiation delivery Apparatus for integrated gas and radiation delivery

2011-04-12

2011-04-12

Hassanzadeh, Parviz (Department: 1712)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With gas inlet structure

C118S7230MP

Reexamination Certificate

active

07922863

ABSTRACT:
An apparatus for photo-assisted or photo-induced processes is disclosed, comprising a process chamber having an integrated gas and radiation distribution plate. In one embodiment, the plate has one set of apertures for distributing one or more process gases, and another set of apertures for distributing radiation to a process region in the chamber.

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